Publications

Optical MEMS | Physical MEMS | Chemical MEMS | Materials for MEMS | Vacuum Microelectronics

Optical MEMS

W. Wang, S. Samson, J. Bumgarner, R. Hazen, S. Kedia, G. Gonzalez, L. Langebrake, R. Agarwal, C. Munoz, and E. Kaltenbacher. Small form factor microsensor system using optical MEMS for passive optical digital communication (PODC). SPIE Proceedings, SPIE Defense and Security (DSS) Symposium, April 9-13, Orlando, FL, 2007.

R. Agarwal, S. Samson, and S. Bhansali. Fabrication of vertical mirrors using plasma etch and KOH:IPA polishing. Journal of Micromechanics and Microengineering, Vol. 17, pp. 26-35, 2007.

R. Agarwal, S. Samson, S. Kedia, and S. Bhansali. Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices. Journal of Microelectromechanical Systems, Vol. 16, No. 1, pp. 122-129, 2007.

W. Wang, S. Samson, J. Bumgarner, R. Hazen, S. Kedia, G.Gonzalez, L. Langebrake, R. Agarwal, C. Munoz, E. Kaltenbacher, B. Rossie, and D. Edwards. Microsensor system using flexible circuit, flat battery and optical MEMS for passive optical digital communication (PODC). Commercialization of Micro and Nanosystems Conference 2006 (COMS2006), August 27-31, St. Petersburg, FL, 2006.

W. Wang, V. Upadhyay, J. Bumgarner, and O. Edwards. Simulation and experimental studies of an uncooled MEMS capacitive infrared detector for thermal imaging. Journal of Physics, Conference Series Vol. 34, International MEMS Conference, Singapore, pp. 350-355, 2006.

W. Wang, V. Upadhyay, J. Bumgarner, and O. Edwards. FEA simulation, design and fabrication of an uncooled MEMS capacitive thermal detector for infrared FPA imaging. SPIE Proceedings, of SPIE, Infrared Technology and Applications XXXII, Vol. 6206, pp. 62061L-1~12, 2006.

S. Samson, S  Kedia, V. Upadhyay, R. Agarwal. MEMS mirror arrays for use in optical spectrometric detection. SPIE Proceedings, SPIE Defense and Security (DSS) Symposium, April 17-21, Orlando, FL, 2006.

S. Samson, R. Agarwal, S. Kedia, W. Wang, S. Onishi, and J. Bumgarner. Fabrication processes for packaged optical MEMS devices. 2005 ICMENS Conference, July 24-27, Banff, Canada, 2005.

Physical MEMS

A. Cardenas-Valencia, J. Dlutowski, J. Bumgarner, C. Munoz, W. Wang, R. Popuri, and L. Langebrake. Development of various designs of low-power, MEMS valves for fluidic applications. Sensors and Actuators: A Physical, Vol. 136, pp. 374-384, 2007.

C. Munoz, J. Bumgarner, C. Reid, W. Wang, S. Kedia, L. Langebrake. Capacitive micromachined ultrasound transducer array. Pan-American Advanced Studies Institute, June 19-30, Costa Rica, 2006.

W. Wang, R. Popuri, S. Onishi, J. Bumgarner, and L. Langebrake. Multiphysics modeling and simulation for a MEMS thermal-mechanical switch. NSTI Nanotech 2006 Conference, May 7-11, Boston, MA, pp. 582-585, 2006.

M. Cardenas, A. Cardenas-Valencia, J. Dlutowski, C. Biver, J. Bumgarner, W. Wang, and L. Langebrake. Modeling and experimental development of MEMS valves. COMSOL Multiphysics Workshop, April 12, Tampa, FL, 2006.

W. Wang and D. Fries. FEA Modeling of a wafer level seam sealing approach for MEMS packaging. 2004 International ANSYS Conference, May 24-26, Pittsburgh, PA, 2004.

V. Upadhyay, S. Samson, W. Wang, and S. Bhansali. Improved MEMS thermal actuator design by modification of hot-arm geometry, CFD modeling and simulation of engineering processes. TMS Annual Meeting, March 14-18, Charlotte, NC, 2004.

Chemical MEMS

A. Chaudhary, F.H.W. van Amerom, and R. Short. Development of microfabricated cylindrical ion trap mass spectrometer arrays. Journal of Microelectromechanical Systems, Vol. 8, Issue 2, pp. 442-448, 2009.

F.H.W. van Amerom, A. Chaudhary, M. Cardenas, J. Bumgarner, and R. Short. Microfabrication of cylindrical ion trap mass spectrometer arrays for handheld chemical analyzers. Chemical Engineering Communications, Vol. 195, Issue 2 pp. 98-114, 2008.

M. Cardenas, A. Cardenas-Valencia, J. Dlutowski, J. Bumgarner, and L. Langebrake. Finite element method modeling approach for the development of metal/silicon nitride MEMS single-use valve arrays. Journal of Micromechanics and Microengineering, Vol. 17, pp.1671-1679, 2007.

M. Janowiak, A. Cardenas-Valencia, M. Hall, and D. Fries. Development of a mobile sensing system for in situ water analysis based on solid-phase extraction-reflection spectroscopy. Measurement Science and Technology, Vol. 16, pp. 729-737, 2005.

Materials for MEMS

S. Jeedigunta, Z. Xu, M. Hirai, P. Spagnol, A. Kumar. Effects of plasma treatments on the nitrogen incorporated nanocrystalline diamond films. Diamond & Related Materials, Vol. 17, pp. 1994-1997, 2008.

S. Jeedigunta, P. Spagnol, J. Bumgarner, A. Kumar. Electrical contacts to nitrogen incorporated nanocrystalline diamond films. Diamond & Related Materials, Vol. 17, pp. 2037-2040, 2008.

J. Dlutowski, C. Biver, W. Wang, S. Knighton, J. Bumgarner, L. Langebrake, W. Moreno, and A. M. Cardenas-Valencia. Development of BCB-sealed galvanic cells. Case Study: Aluminum-platinum cells activated with sodium hypochlorite electrolyte solution. Journal of Micromechanics and Microengineering, Vol. 17, pp.1737-1745, 2007.

Vacuum Microelectronics

B. Reichenbach, I. Solano, and P. R. Schwoebel. A field evaporation deuterium ion source for neutron generators. Journal of Applied Physic, Vol. 103, pp. 094912-1 - 094912-4, 2008.

P. R. Schwoebel. Field emission arrays for medical X-ray imaging. Applied Physics Letters, Vol. 88, pp. 113902-113904, 2006.

P. R. Schwoebel. Field desorption ion source for neutron generators. Applied Physics Letters, Vol. 87, pp. 5410141-451043, 2005.

P. R. Schwoebel, C. A. Spindt, C. E. Holland, and J. A Panitz. Field emission current cleaning and annealing of microfabricated field emission cathodes. Journal of Vacuum Science and Technology B, Vol. 19, pp. 980-987, 2001.

C. A. Spindt, I. Brodie, C. E. Holland, and P. R. Schwoebel. Spindt field emitter arrays in vacuum microelectronics. Edited by W. Zhu and T. Utsumi (Wiley, NY), 2001.

G. N. Fursey. Field Emission. Edited by P. R. Schwoebel and I. Brodie (Plenum, New York), 2003.

P. R. Schwoebel, E. M. Pearson, K. H. Lau, D. M. Lowe and A. Sanjurjo. Lifetime extension of cathodoluminescent P-1 phosphor. Electrochemical and Solid State Letters, Vol. 1, pp. 102-103, 1998.

C. A. Spindt, C. E. Holland, P. R. Schwoebel, and I. Brodie. Field emitter array development for microwave applications. Journal of Vacuum Science and Technology B, Vol. 14, pp. 1986-1989, 1996.

P. R. Schwoebel and I. Brodie. Surface-Science aspects of vacuum microelectronics. Journal of Vacuum Science and Technology, Vol. 13, pp. 1391-1410, 1995.

I. Brodie and P. R. Schwoebel. Vacuum microelectronic devices. Proceedings of the IEEE, Vol. 82, pp. 1055-1034, 1994.

P. R. Schwoebel and C. A. Spindt. Field emitter array performance enhancement using hydrogen glow discharges. Applied Physics Letters, Vol. 63, pp. 33-35, 1993.

P. R. Schwoebel. Recovery of luminous efficiency of degraded willemite phosphor in an oxygen glow discharge. Journal of the Electrochemical Society, Vol. 140, pp. L34-L35, 1993.

P. R. Schwoebel and J. A. Panitz. Ion emission from liquid lithium for inertial confinement-fusion applications. Physical Review Letters, Vol. 67, pp. 2175-2178, 1991.

P. R. Schwoebel and P. J. Feibelman. Extraction of Ir-Ir interaction strengths on Ir (100) from field ion microscopy of iridium cluster structures. Surface Science, Vol. 216, pp. 263-269, 1989.