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Vacuum Microelectronics

The genesis of SRI's Vacuum Microelectronics Program was the invention 30 years ago of the Spindt cold cathode — an array of microfabricated conductive tips (typically molybdenum), integrated with a base and gate electrode, capable of producing high-current electron beams in vacuum by field emission.

This technology made possible low-power, bright, colorful, thin displays without the viewing angle limitations of liquid crystals. The technology is suitable for laptop and desktop computer displays and normal and high-definition television, as well as applications in which the use of high-temperature electron and ion sources are not preferred.

Directed by the technology's namesake, Dr. Charles "Capp" Spindt, the current research and development areas of the Vacuum Microelectronics Program include high-power microwave sources, pulsed-power devices, cathodes for spacecraft, X-ray tubes, microthrusters for satellites, and compact ion sources.

Researchers in SRI's Vacuum Microelectronics Program are also working on novel tomographic imaging technology for medical diagnostics and research.

Cathode Tip

SEM image of Spindt cold cathode tip

Selected publications

For more information, contact:
MicroScience Engineering Laboratories
SRI International
333 Ravenswood Avenue
Menlo Park, CA 94025
Phone: 650-859-3042
info-msel@sri.com

 

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